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Copyright: Fraunhofer ILT
Compact EUV radiation sources from Fraunhofer ILT, Aachen, enable new industrial and research applications in the field of nanotechnology, which are intensively studied in the EUV Technology group. Short wavelength and efficient interaction of EUV radiation with matter allow not only for large area nanostructuring but also for high precision thin film metrology and high resolution imaging.
Photo: Fraunhofer ILT
read more...zu: EUV-Technology